Serial laser lithography for efficient manufacture of universal microstructures
The technique of microstructuring revolutionises all classical fields of engineering like electronics, optics and mechanics. In order to manufacture a microstructure in large quantities and at a reasonable price, master elements or masks will be formed that can be duplicated in a highly efficient pr...
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| Format: | Default Thesis |
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1997
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| Online Access: | https://hdl.handle.net/2134/11202 |
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