Ultrahigh frequency microplasmas from 1 pascal to 1 atmosphere
The generation of plasma-on-a-chip is examined for two extremes in gas pressure. The application of microplasmas as sensors of industrial vacuum processes requires stable operation at gas pressures of less than 1 Pa. In this low-pressure regime, the addition of a static magnetic field that causes el...
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| Main Authors: | , |
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| Format: | Default Article |
| Published: |
2004
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| Subjects: | |
| Online Access: | https://hdl.handle.net/2134/3215 |
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