Bidirectional electromigration failure
Pulsed bidirectional currents in copper interconnect can cause electromigration (EM) –induced cyclic void behaviour. Cycles of void nucleation, growth, shrinkage and healing may be seen in the time variation of a line’s resistance profile. In practice each cycle appears to create some net effect so...
Saved in:
| Main Authors: | , , , |
|---|---|
| Format: | Default Article |
| Published: |
2013
|
| Subjects: | |
| Online Access: | https://hdl.handle.net/2134/17818 |
| Tags: |
Add Tag
No Tags, Be the first to tag this record!
|