Influence of operating frequency and coupling coefficient on the efficiency of microfabricated inductively coupled plasma sources
Microfabricated inductively coupled plasma (mICP) generators, operating at 690 and 818 MHz, have been constructed and characterized. The mICP consists of a single-turn coil that is 5mm in diameter and a microfabricated matching network. Ion densities of ~9 × 10(10) cm−3 in argon at 400mTorr consumin...
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| Main Authors: | , |
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| Format: | Default Article |
| Published: |
2002
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| Subjects: | |
| Online Access: | https://hdl.handle.net/2134/3226 |
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