Evaluation of the performance of tilt scanning interferometry for tomographic imaging and profilometry

In this paper we investigate the performance of Tilt Scanning Interferometry in tomographic imaging and profilometry applications, with an emphasis on the factors that limit the quality of image reconstruction. Depth resolution is mainly degraded by a frequency chirp that appears in the temporal int...

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Bibliographic Details

Main Authors:	Bona S.H. Burlison, Pablo Ruiz, Jonathan Huntley
Format:	Default Article
Published:	2012
Subjects:	Mechanical engineering not elsewhere classified Tilt scanning interferometry Angular spectrum scanning Optical coherence tomography Depth-resolved metrology Mechanical Engineering not elsewhere classified
Online Access:	https://hdl.handle.net/2134/16736
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