Abnormal heating of low-energy electrons in low-pressure capacitively coupled discharges

In low-pressure capacitively coupled plasmas, high-energy electrons are collisionlessly heated by large rf fields in the sheaths while low-energy electrons are confined in the bulk plasma by the ambipolar potential. Low-energy electrons are typically inefficiently heated due to their low collisional...

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Bibliographic Details

Main Authors:	G.Y. Park, S.J. You, Felipe Iza, Jae Koo Lee
Format:	Default Article
Published:	2007
Subjects:	Mechanical engineering not elsewhere classified untagged Mechanical Engineering not elsewhere classified
Online Access:	https://hdl.handle.net/2134/3224
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