High-throughput single-shot hyperspectral interferometer for areal profilometry based on microlens array integral field unit

A single-shot technique to measure areal profiles on optically smooth and rough surfaces and for applications in non-cooperative environments is presented. It is based on hyperspectral interferometry (HSI), a technique in which the output of a white-light interferometer provides the input to a hyper...

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Bibliographic Details
Main Authors: Pablo Ruiz, Jonathan Huntley
Format: Default Conference proceeding
Published: 2017
Subjects:
Mechanical engineering not elsewhere classified
Height measurements
Metrology
Single-shot
Hyperspectral interferometry
Microlens array
Integral field unit
Mechanical Engineering not elsewhere classified
Online Access:https://hdl.handle.net/2134/24829
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