Areal texture and angle measurements of tilted surfaces using focus variation methods
Optical instruments for areal surface topography measurement have seen significant commercial development in the last five years, along with the ISO 25178 areal standard. Providing the user with confidence in new instruments depends on understanding instrument behavior and sources of error. Focus va...
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| Main Authors: | , , , , |
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| Format: | Default Conference proceeding |
| Published: |
2012
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| Subjects: | |
| Online Access: | https://hdl.handle.net/2134/11559 |
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