Areal texture and angle measurements of tilted surfaces using focus variation methods

Optical instruments for areal surface topography measurement have seen significant commercial development in the last five years, along with the ISO 25178 areal standard. Providing the user with confidence in new instruments depends on understanding instrument behavior and sources of error. Focus va...

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Bibliographic Details
Main Authors: Florine Hiersemenzel, Jon Petzing, Richard K. Leach, F. Helmli, Jagpal Singh
Format: Default Conference proceeding
Published: 2012
Subjects:
Online Access:https://hdl.handle.net/2134/11559
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