Blistering of magnetron sputtered thin film CdTe devices
Magnetron sputtering is an industrially scalable technique for thin film deposition. It provides excellent coating uniformity and the deposition can be conducted at relatively low substrate temperatures. It is widely used in the manufacture of solar modules. However, its use for the deposition of th...
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| Main Authors: | , , , , , , |
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| Format: | Default Conference proceeding |
| Published: |
2017
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| Subjects: | |
| Online Access: | https://hdl.handle.net/2134/27450 |
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