Low-power microwave plasma source based on a microstrip split-ring resonator

Microplasma sources can be integrated into portable devices for applications such as bio-microelectromechanical system sterilization, small-scale materials processing, and microchemical analysis systems. Portable operation, however, limits the amount of power and vacuum levels that can be employed i...

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Bibliographic Details

Main Authors:	Felipe Iza, Jeffrey A. Hopwood
Format:	Default Article
Published:	2003
Subjects:	Mechanical engineering not elsewhere classified low-power microplasma microwave plasma split-ring resonator Mechanical Engineering not elsewhere classified
Online Access:	https://hdl.handle.net/2134/3211
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