Modeling the electromigration failure time distribution in short copper interconnects
The electromigration EM lifetime in short copper interconnects is modeled using a previously developed means of generating realistic interconnect microstructures combined with the one-dimensional stress evolution equation of Korhonen et al. J. Appl. Phys. 73, 3790 1993 . This initial analysis descri...
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| Format: | Default Article |
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2008
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| Online Access: | https://hdl.handle.net/2134/4986 |
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