Modeling the electromigration failure time distribution in short copper interconnects

The electromigration EM lifetime in short copper interconnects is modeled using a previously developed means of generating realistic interconnect microstructures combined with the one-dimensional stress evolution equation of Korhonen et al. J. Appl. Phys. 73, 3790 1993 . This initial analysis descri...

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Bibliographic Details
Main Author: Vincent Dwyer
Format: Default Article
Published: 2008
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Online Access:https://hdl.handle.net/2134/4986
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