Coherence scanning interferometry: measurement and correction of three-dimensional transfer and point-spread characteristics

When applied to the measurement of smooth surfaces, coherence scanning interferometry can be described by a three-dimensional linear filtering operation that is characterized either by the point-spread function in the space domain or equivalently by the transfer function (TF) in the spatial frequenc...

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Bibliographic Details
Main Authors: Rahul Mandal, Jeremy Coupland, Richard K. Leach, D. Mansfield
Format: Default Article
Published: 2014
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Mechanical engineering not elsewhere classified
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Mechanical Engineering not elsewhere classified
Mechanical Engineering
Online Access:https://hdl.handle.net/2134/34687
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https://hdl.handle.net/2134/34687

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