Coherence scanning interferometry: measurement and correction of three-dimensional transfer and point-spread characteristics

When applied to the measurement of smooth surfaces, coherence scanning interferometry can be described by a three-dimensional linear filtering operation that is characterized either by the point-spread function in the space domain or equivalently by the transfer function (TF) in the spatial frequenc...

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Bibliographic Details

Main Authors:	Rahul Mandal, Jeremy Coupland, Richard K. Leach, D. Mansfield
Format:	Default Article
Published:	2014
Subjects:	Mechanical engineering not elsewhere classified untagged Mechanical Engineering not elsewhere classified Mechanical Engineering
Online Access:	https://hdl.handle.net/2134/34687
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