Single-shot areal profilometry using hyperspectral interferometry with a microlens array
We describe a single-shot technique to measure areal profiles on optically smooth and stepped surfaces for applications where rapid data acquisition in non-cooperative environments is essential. It is based on hyperspectral interferometry (HSI), a technique in which the output of a white-light inter...
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| Main Authors: | , |
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| Format: | Default Article |
| Published: |
2017
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| Subjects: | |
| Online Access: | https://hdl.handle.net/2134/24772 |
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