Single-shot areal profilometry using hyperspectral interferometry with a microlens array

We describe a single-shot technique to measure areal profiles on optically smooth and stepped surfaces for applications where rapid data acquisition in non-cooperative environments is essential. It is based on hyperspectral interferometry (HSI), a technique in which the output of a white-light inter...

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Bibliographic Details
Main Authors: Pablo Ruiz, Jonathan Huntley
Format: Default Article
Published: 2017
Subjects:
Online Access:https://hdl.handle.net/2134/24772
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