Use of thin laminar liquid flows above ablation area for control of ejected material during excimer machining

To observe excimer laser machining through thin liquid films and the effects thereof on debris control, equipment was designed to contain a small control volume that can be supplied with a laminar thin film of de-ionized (DI) water to flow over the workpiece. Using the same equipment, comparison wit...

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Bibliographic Details

Main Authors:	Colin F. Dowding, Jonathan Lawrence
Format:	Default Article
Published:	2009
Subjects:	Mechanical engineering not elsewhere classified Excimer Ablation Debris control Liquid Polymer Mechanical Engineering not elsewhere classified Mechanical Engineering
Online Access:	https://hdl.handle.net/2134/6399
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