Focus variation microscope: linear theory and surface tilt sensitivity

In a recent publication [3rd International Conference on Surface Metrology, Annecy, France, 2012, p. 1] it was shown that surface roughness measurements made using a focus variation microscope (FVM) are influenced by surface tilt. The effect appears to be most significant when the surface has micros...

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Bibliographic Details

Main Authors:	Nikolay Nikolaev, Jon Petzing, Jeremy Coupland
Format:	Default Article
Published:	2016
Subjects:	Mechanical engineering not elsewhere classified Microscopy Optical transfer functions Mechanical Engineering not elsewhere classified Mechanical Engineering
Online Access:	https://hdl.handle.net/2134/21628
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