Contrasting characteristics of linear-field and cross-field atmospheric plasma jets

This letter reports an experimental study of two types of atmospheric pressure plasma jets in terms of their fundamental properties and their efficiency in etching polymeric materials. The first plasma jet has a cross-field configuration with its electric field perpendicular to its gas flow field, w...

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Bibliographic Details

Main Authors:	James L. Walsh, Michael G. Kong
Format:	Default Article
Published:	2008
Subjects:	Mechanical engineering not elsewhere classified Plasma chemistry Plasma flow Plasma jets Plasma transport processes Polymer films Sputter etching Mechanical Engineering not elsewhere classified
Online Access:	https://hdl.handle.net/2134/5198
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