Effects of defocus on the transfer function of coherence scanning interferometry

© 2018 Optical Society of America. Coherence scanning interferometry (CSI) offers three-dimensional (3D) measurement of surface topography with high precision and accuracy. Defocus within the interferometric objective lens, however, is commonly present in CSI measurements and reduces both the resolv...

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Bibliographic Details

Main Authors:	Rong Su, Matthew Thomas, Richard K. Leach, Jeremy Coupland
Format:	Default Article
Published:	2017
Subjects:	Mechanical engineering not elsewhere classified Foundations of quantum mechanics untagged Mechanical Engineering not elsewhere classified Quantum Mechanics
Online Access:	https://hdl.handle.net/2134/32660
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