Refractive index determination by coherence scanning interferometry

Coherence scanning interferometry is established as a powerful noncontact, three-dimensional, metrology technique used to determine accurate surface roughness and topography measurements with subnanometer precision. The helical complex field (HCF) function is a topographically defined helix modulate...

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Bibliographic Details

Main Authors:	Hiro Yoshino, Piotr Kaminski, Roger Smith, Michael Walls, D. Mansfield
Format:	Default Article
Published:	2016
Subjects:	Mechanical engineering not elsewhere classified untagged Mechanical Engineering not elsewhere classified Mechanical Engineering
Online Access:	https://hdl.handle.net/2134/21700
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