The impact of medium chemistry to flowing liquid closed immersion ablation of bisphenol A polycarbonate.

Equipment has been developed to enable KrF excimer laser ablation machining of a bisphenol A polycarbonate sample under closed thick film flowing liquid immersion. The liquid medium is easily changeable, offering the possibility of chemical modification of the material etching mechanism. Previous wo...

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Bibliographic Details

Main Authors:	Colin F. Dowding, Jonathan Lawrence
Format:	Default Article
Published:	2010
Subjects:	Mechanical engineering not elsewhere classified Excimer Laser ablation Liquid immersion Medium Plume etching Mechanical Engineering not elsewhere classified
Online Access:	https://hdl.handle.net/2134/6594
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