Effects of the manufacturing process on the reliability of the multilayer structure in MetalMUMPs actuators: Residual stresses and variation of design parameters

© 2017 by the authors. Potential problems induced by the multilayered manufacturing process pose a serious threat to the long-term reliability of MEMSCAP® actuators under in-service thermal cycling. Damage would initiate and propagate in different material layers because of a large mismatch of their...

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Bibliographic Details
Main Authors: Jianbin Guo, Jinling Wang, Shengkui Zeng, Vadim Silberschmidt, Yongguang Shen
Format: Default Article
Published: 2017
Subjects:
Mechanical engineering not elsewhere classified
Micro electromechanical systems (MEMS)
Residual stresses
Subdomain method
Manufacturing process
Multilayer structure
Mechanical Engineering not elsewhere classified
Online Access:https://hdl.handle.net/2134/27987
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https://hdl.handle.net/2134/27987

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