Excimer laser machining of bisphenol A polycarbonate under closed immersion filtered water with varying flow velocities and the effects on the etch rate

Until now, progress in laser ablation micromachining has been significantly limited with respect to feature miniaturization and output yield by ablation-generated debris. Gas-jetting techniques have proven to be inadequate and vacuum environments are unwieldy in an industrial setting. To this end, a...

Full description

Bibliographic Details

Main Authors:	Colin F. Dowding, Jonathan Lawrence
Format:	Default Article
Published:	2010
Subjects:	Mechanical engineering not elsewhere classified untagged Mechanical Engineering not elsewhere classified Mechanical Engineering
Online Access:	https://hdl.handle.net/2134/6410
Tags:	Add Tag No Tags, Be the first to tag this record!