Coherence scanning interferometry: linear theory of surface measurement

The characterization of imaging methods as three-dimensional (3D) linear filtering operations provides a useful way to compare the 3D performance of optical surface topography measuring instruments, such as coherence scanning interferometry, confocal and structured light microscopy. In this way, the...

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Bibliographic Details

Main Authors:	Jeremy Coupland, Rahul Mandal, Kanik Palodhi, Richard K. Leach
Format:	Default Article
Published:	2013
Subjects:	Mechanical engineering not elsewhere classified untagged Mechanical Engineering not elsewhere classified Mechanical Engineering
Online Access:	https://hdl.handle.net/2134/13310
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