Particle-in-cell Monte Carlo and fluid simulations of argon-oxygen plasma : comparisons with experiments and validations

Particle-in-cell Monte Carlo collision (PIC-MCC) and fluid simulations of argon-oxygen plasmas in capacitively and inductively coupled plasma reactors are presented. Potential profiles and electron/ ion kinetic information such as electron/ion energy distributions and temperatures are compared with...

Full description

Bibliographic Details

Main Authors:	S.H. Lee, Felipe Iza, Jae Koo Lee
Format:	Default Article
Published:	2006
Subjects:	Mechanical engineering not elsewhere classified untagged Mechanical Engineering not elsewhere classified
Online Access:	https://hdl.handle.net/2134/3227
Tags:	Add Tag No Tags, Be the first to tag this record!