Focal position-controlled processing head for a laser pattern generator (LPG) for flexible micro-structuring
In micro-structuring processes a direct structuring of the substrate is, in most cases, not possible and therefore the profile is first obtained in photo resist and then, in a second step, transferred into the substrate. The resist structuring can be performed using the flexible characteristics of a...
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| Format: | Default Thesis |
| Published: |
1995
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| Online Access: | https://hdl.handle.net/2134/27255 |
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